Application Note : Statistical Process Control (SPC) with Operator DB
Summary
This application note shows the interaction between the Operator DB and Flow DB, where SPC can be applied as part of the working environment.
Statistical Process Control (SPC) is a powerful technique used to ensure a stable and adaptable cleanroom environment during the crucial stages of development, and volume production. Process flow or equipment is rarely changed, despite this the result can alter due to:
- full continue processing - cleaning steps will impact the process
- more automated equipment can reduce parameter spread
- (small) fluctuations in temperature / humidity between day and night working hours - such small changes may have a considerable influence on components
The Operator DB is a structured method of storing and analyzing data crucial to easily ensuring the traceability of effects on the process.
A simple RIE process and measurement is used, in this application note, to show how the Flow DB can be used to configure the basic part of the Operator DB for SPC, by:
- Firstly, showing what (process) parameters there are and what results can be expected
- Secondly, demonstrating how this data is put into the Operator DB so that cleanroom operators can easily provide data for the last step.
- Finally, (briefly) discussing where the data will be used in analysis.
Other topics
| Oct 20, 2008 | Integrated SOIMUMPs design by using MaskEngineer and FlowDesigner |
| Nov 20, 2007 | Process development using Design of Experiment |
| Jan 9, 2007 | Root finding using scripts |
| Sep 19, 2006 | Design of Experiment (DOE) + Monte-Carlo (MC) |
| Jul 19, 2006 | AWG design using OptoDesigner |
| Jul 1, 2006 | Network based layout, an application note |
| Jun 1, 2006 | GDS compiler for curve discretisation |
| May 31, 2005 | The Living Database at Nanotech 2005 |
| May 31, 2005 | The Living Database at Semicon Europe 2005 |
| Apr 5, 2005 | Integrating PhoeniX FlowDesigner into the Business Model |
| Feb 18, 2004 | Statistical Process Control (SPC) with Operator DB |
| Dec 12, 2003 | Cleanroom data management simplified |
| Sep 10, 2003 | Trends in Micro and Nano software |
| Sep 1, 2003 | PhoeniX Cleanroom Database: Process Flow module |
