Application Note : PhoeniX Cleanroom Database: Process Flow module
Summary
Documentation is important in teamwork: who knows what and/or where can I find it? Given the complexity of the cleanroom environment, documentation becomes a tricky matter, for which PhoeniX presents the solution
Keywords: cleanroom , CoreDB , documentation , equipment
Documentation of the cleanroom activities is required to preserve the knowledge about the processes and the technologies involved; hence different users with different levels of expertise can obtain the relevant information easily.
However, a documentation for the micro"s and nano"s cleanroom processes is difficult to realize because of the diverse technologies involved(1).
The Process Flow Module in the PhoeniX Cleanroom Database is a tool to manage the documentation for the micro"s and nano"s cleanroom processes. It offers the flexibility to implement various processes and technologies affected. Nevertheless, its thoughtfully defined hierarchy and templates secure the communication standardization.
When the database is managed correctly, the available processes are accessible considerably. Furthermore, the quality improvement and most of the validation process will be automatically accomplished also.
PhoeniX ProcessFlowDB module can be extended to the OperatorDB module to incorporate the data digestion. The output data from the equipments can be registered as the input of the statistical process control for design iterations by using the simlink. Scripts can perform the statistical process control, and also can send an automatic warning message and email when a deviation is detected.
The purpose of this application note is to exemplify the development of an effective cleanroom database by using the PhoeniX Process Flow Module. The focus of this note is not on the technological issues, but on the documentation and the verification aspects.
The case study for this note, because of its well described technology, is the process flow of the optical core SiON by using the PECVD and RIE processes.
Download PDF file (1.8M) or a summary (400k)
Other topics
| Oct 20, 2008 | Integrated SOIMUMPs design by using MaskEngineer and FlowDesigner |
| Nov 20, 2007 | Process development using Design of Experiment |
| Jan 9, 2007 | Root finding using scripts |
| Sep 19, 2006 | Design of Experiment (DOE) + Monte-Carlo (MC) |
| Jul 19, 2006 | AWG design using OptoDesigner |
| Jul 1, 2006 | Network based layout, an application note |
| Jun 1, 2006 | GDS compiler for curve discretisation |
| May 31, 2005 | The Living Database at Nanotech 2005 |
| May 31, 2005 | The Living Database at Semicon Europe 2005 |
| Apr 5, 2005 | Integrating PhoeniX FlowDesigner into the Business Model |
| Feb 18, 2004 | Statistical Process Control (SPC) with Operator DB |
| Dec 12, 2003 | Cleanroom data management simplified |
| Sep 10, 2003 | Trends in Micro and Nano software |
| Sep 1, 2003 | PhoeniX Cleanroom Database: Process Flow module |
