Application Note : The Living Database at Nanotech 2005
Summary
Design of Experiment Tools for Process and Device Development
Keywords: cleanroom database , mask layout engineer , process flow designer
Abstract
The functionality of a Micro and Nano Technologies (MNT) device is defined substantially by its shape; for instance, the sensitivity of a membrane to pressure depends on its size and thickness. MNT devices, therefore, need a multi-disciplined approach for design and fabrication. A commonly-used strategy for achieving optimized device performance is the Design of Experiment (DOE). PhoeniX has created software tools for the manufacturing environment that provide the missing link in a proper MNT-based DOE. As a result, a faster and more (cost) effective design cycle can be established.
The presentation of The Living Database at Nanotech 2005 can be downloaded here (pdf file, 857 Kb).
Other topics
| Oct 20, 2008 | Integrated SOIMUMPs design by using MaskEngineer and FlowDesigner |
| Nov 20, 2007 | Process development using Design of Experiment |
| Jan 9, 2007 | Root finding using scripts |
| Sep 19, 2006 | Design of Experiment (DOE) + Monte-Carlo (MC) |
| Jul 19, 2006 | AWG design using OptoDesigner |
| Jul 1, 2006 | Network based layout, an application note |
| Jun 1, 2006 | GDS compiler for curve discretisation |
| May 31, 2005 | The Living Database at Nanotech 2005 |
| May 31, 2005 | The Living Database at Semicon Europe 2005 |
| Apr 5, 2005 | Integrating PhoeniX FlowDesigner into the Business Model |
| Feb 18, 2004 | Statistical Process Control (SPC) with Operator DB |
| Dec 12, 2003 | Cleanroom data management simplified |
| Sep 10, 2003 | Trends in Micro and Nano software |
| Sep 1, 2003 | PhoeniX Cleanroom Database: Process Flow module |
