Application Note : GDS compiler for curve discretisation
Summary
Mask file generation using a GDS compiler solves for many accuracy issues in smooth curves
Keywords: accuracy , cross-section , gds compiler , MaskEngineer
This application note shows how to use the MaskEngineer and its related product OptoDesigner to create GDSII files with good accuracy. Different aspects have to be taken into account during the GDSII creating, therefore the MaskEngineer uses a GDS-compiler which processes the basic shapes in the design.
This GDS compiler can then also be used to generate curves which different accuracies, which is needed to circumvent the memory limitations of mask-plate inspection machines. Such machines check the masks which have been written with E-beam with the data from the GDSII files, which helps to detect errors early on and / or allows repairs on the mask plates. Many mask vendors have such equipment.
For more information, please take a look at the PDF file.
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