Application Note : Process development using Design of Experiment
Summary
In the EU funded project DRIESO, Alcatel, LioniX and PhoeniX co-operated to take the next step in process development for deep RIE structures as shown by S. Kriswandhi
Keywords: CoreDB , flow , FlowDB , Living Database , process , RIE
Over thirty years the manufacturing of micro-system devices has made a vast breakthrough. New compounds, more refined machines and technologies enable people to father new inventions which were not too long ago considered to be a novel physics.
Deep, thin microscopic channels to accommodate high speed micro-optical chips and advanced MEMS chips processing are now feasible to be made. Such chips support the ever increasing demand for bandwidth at lower cost, eg. "video on demand" or high speed internet services. Also the highly integrated Intelligent Ambient Technology, which notoriously requires compact and low-energy chips, can be round up by human's hands. Quantum electronics which allows super electronics is now within the realm of reality.
However, by far we have not taste the benefit from all these happenings. The so-called "technology's immaturity to the market" is the general term to answer the arisen question: Why.
For more information, please take a look at the PDF file.
Other topics
| Oct 20, 2008 | Integrated SOIMUMPs design by using MaskEngineer and FlowDesigner |
| Nov 20, 2007 | Process development using Design of Experiment |
| Jan 9, 2007 | Root finding using scripts |
| Sep 19, 2006 | Design of Experiment (DOE) + Monte-Carlo (MC) |
| Jul 19, 2006 | AWG design using OptoDesigner |
| Jul 1, 2006 | Network based layout, an application note |
| Jun 1, 2006 | GDS compiler for curve discretisation |
| May 31, 2005 | The Living Database at Nanotech 2005 |
| May 31, 2005 | The Living Database at Semicon Europe 2005 |
| Apr 5, 2005 | Integrating PhoeniX FlowDesigner into the Business Model |
| Feb 18, 2004 | Statistical Process Control (SPC) with Operator DB |
| Dec 12, 2003 | Cleanroom data management simplified |
| Sep 10, 2003 | Trends in Micro and Nano software |
| Sep 1, 2003 | PhoeniX Cleanroom Database: Process Flow module |
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