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Is the Living Database able to communicate directly with our equipment?
Keywords: links to equipment
, Living Database
, mst cleanroom database
, SECSII
, wafer tracking
Question :
Is the Living Database able to communicate directly with our equipment?
Answer :
PhoeniX is working to reduce the "tedious" equipment maintenance and "prone to
mistake" data collecting from the equipment. At the moment the Living Database is separate from the
equipment because typically each equipment has it's own interface protocol over the SEMI standard SECSII. However we are working closely with equipment vendors, like for instance Alcatel Micro Machining Systems, to make more use of the data the equipment provides. In customisation projects we can provide links with equipment or enviromental data.
See also :
How is SPC implemented in your tools?
For any remark/question, please contact: support@phoenixbv.comOther topics
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