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FlowDesigner

The design of many 3D structures is simplified by representing it as a 2D structure (side-view or cross section) to which the different process steps are applied. During these stages many pictures are being drawn by hand, which is a cumbersome and error-prone process.

This module provides the designer with a software tool capable of doing these steps automatically and allows her/him to vary parameters to obtain the required result.

Example

    Main features

  • Replace your drawing software (like CorelDraw(tm)) and get more detail.
    Instead of using a rough outline, you will get details like under-etching with profiles and non-vertical angles
  • Assumption replacement
    In many cases assumptions are made for the real-life stages of the process flow. This is mainly due to the hand-drawn pictures. It is simply not feasible to draw these pictures without those assumptions.
    Using FlowDesigner, these simplifications are not needed, because it can take much more information into account.
  • Tolerance analysis
    Vary key parameters (etching rates / deposition rates / selectivity) and see the effect on your structure.
  • Validation
    A fast validation of a mask layout can show important problems like under-etching due to the proximity of features on your mask design.

For more information, please take a look at the PDF file.
For further information please contact us or use the information request form
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